The Clean Room Laboratory covers 300 m2, fully equipped with the latest tools for micromachining: mask aligner, substrate bonder, DRIE, sputter tool, furnaces, microelectronic packaging, wafer bonding, microstereolitography, reliability analysis, optical and electronic microscopes.

Those processes enable prototyping of Microsystems and miniaturised smart systems capable of carrying out functions like sensing that can be applied in restricted or hostile industrial environments.

The Laboratory is divided in three different areas:

• First one, class 100 level, includes Fotolitography processes,
• Second, class 1000, contains Processing, Characterisation and Chemical benches.
• Finally, class 10000, is devoted to Packaging housing and integration